任鑫,窦春岳,齐鹏涛,赵瑞山

• 1:辽宁工程技术大学材料科学与工程学院

摘要(Abstract)：

利用多弧离子镀-磁控溅射复合技术通过改变脉冲偏压在Si片与SS304基体表面制备了TiAlCN薄膜,研究了不同脉冲偏压对薄膜结构和力学性能的影响。薄膜成分、表面形貌、相结构及力学性能分别利用能量弥散X射线谱(EDS)、扫描电镜(SEM)、X射线衍射(XRD)和纳米压痕仪等设备进行表征。结果表明,随着脉冲负偏压的增加,薄膜中Ti元素的含量先减小后增大,而Al元素有相反的变化趋势。适当增大脉冲偏压,薄膜表面颗粒、凹坑等缺陷得到明显改善。物相分析表明TiAlCN薄膜主要由(Ti,Al)(C,N)相,Ti_4N_(3-)_x相和Ti_3Al相组成。薄膜平均硬度与弹性模量随脉冲负偏压的增加先增大后减小,在负偏压-200 V时达到最大值分别为36.8 GPa和410 GPa。

关键词(KeyWords)： TiAlCN薄膜;复合离子镀;脉冲偏压;结构;力学性能

Abstract:

Keywords:

基金项目(Foundation): 辽宁省教育厅科学技术研究资助项目(LJYL007)

作者(Author): 任鑫,窦春岳,齐鹏涛,赵瑞山

DOI: 10.13289/j.issn.1009-6264.2019-0410

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